Etel

Active isolation systems

The QuiET active isolation system is a new module cancelling both stage-born and ground-born vibrations along 6 Degrees Of Freedom (6 DOF), preventing them from perturbating the process taking place on top of your motion platform.

Most of the time, high-end applications in the semiconductor industry integrate complex equipment set-up, which, in one way or another, is connected to the granite of the motion platform.

As such, any vibration at the granite level translates into inaccuracies and longer settling times at the process tool level. Thanks to ETEL’s solution, getting rid of those vibrations has never been done so efficiently!

For more information: Active isolation System